Calculation of refractive index and extinction coefficient of perfluorinated polymer films using new numerical algorithm in prism coupling technique

  • Viktor I. Sokolov ,
  • Ivan O. Goriachuk ,
  • Alexander S. Akhmanov
  • a,b,c Institute on Photonic Technologies, Federal Scientific Research Center «Crystallography and Photonics», Russian Academy of Sciences
  • a,c Federal Research Center «Scientific Research Institute for System Analysis», Russian Academy of Sciences
Cite as
Sokolov V.I., Goriachuk I.O., Akhmanov A.S. (2020). Calculation of refractive index and extinction coefficient of perfluorinated polymer films using new numerical algorithm in prism coupling technique. Proceedings of the 32nd European Modeling & Simulation Symposium (EMSS 2020), pp. 296-299. DOI: https://doi.org/10.46354/i3m.2020.emss.042

Abstract

Amorphous perfluorinated polymers are of great interest for integrated optics and photonics due to their high optical transparency, low refractive index and index dispersion. Therefore, methods for accurate measuring optical parameters and thickness of light-guiding polymer films are important. We present new approach and numerical algorithm for calculating refractive index, extinction coefficient and thickness of anisotropic polymer films from angular reflection spectra measured by prism coupling technique. The proposed algorithm is valid both in the «low» and «high» coupling limits and takes into consideration the angular divergence of the Gaussian probe beam. Light-guiding film of proprietary amorphous perfluorinated polymer was fabricated on silicon substrate with thermally grown silica oxide layer. Angular reflectivity spectra of polymer film were measured with TE and TM polarized Gaussian laser beams using the prism coupling technique. Refractive index n, extinction coefficient m and thickness Hf of the film were calculated numerically from reflectivity spectra using the new strategy and fitting algorithm. It was shown that the developed approach is effective and permits to determine n and m of anisotropic polymer films with accuracy  1  10-4 and  1  10-5 correspondingly.

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