Amorphous perfluorinated polymers are of great interest for integrated optics and photonics due to their high optical transparency, low refractive index and index dispersion. Therefore, methods for accurate measuring optical
parameters and thickness of light-guiding polymer films are important. We present new approach and numerical algorithm for calculating refractive index, extinction coefficient and thickness of anisotropic polymer films
from angular reflection spectra measured by prism coupling technique. The proposed algorithm is valid both in the «low» and «high» coupling limits and takes into consideration the angular divergence of the Gaussian probe
beam. Light-guiding film of proprietary amorphous perfluorinated polymer was fabricated on silicon substrate with thermally grown silica oxide layer. Angular reflectivity spectra of polymer film were measured with
TE and TM polarized Gaussian laser beams using the prism coupling technique. Refractive index n, extinction coefficient m and thickness Hf of the film were calculated numerically from reflectivity spectra using the new
strategy and fitting algorithm. It was shown that the developed approach is effective and permits to determine n and m of anisotropic polymer films with accuracy 1 10-4 and 1 10-5 correspondingly.
Prism-Coupling Technique | Light-Guiding Structures | Amorphous Perfluorinated Polymers | Calculation Of Refractive Index And Extinction Coefficient Of Thin Films | Simulation Of Reflection Spectra | Thin Anisotropic Films | Fitting Algorithms